EDC System - EDC™Series
Complete Process Control
Laurell Technologies is the Global Leader in Single Wafer Spin Processing Technology.
Established in1985, we have nearly 20,000 systems installed worldwide.
We manufacture the only system that is ETL® listed and certified to CE, CSA® and UL® standards.
What an EDC system does
It is designed to execute an in-situ sequential process, which can be made up of a number of components, in an order which suits the customers process.
Develop
Etch
Clean
The EDC™ Series EDC System is compact and packed with advanced features.
PROVEN
Over 12000 systems installed worldwide. Luarell Technologies exclusive “Dry In, Dry Out” process ensure the wafer and chemical delivery path are cleaner and dried after every use.
FLEXIBLE
Master Design with more actual processes and substrates supported than all others combined. Capableof in-situ mixing of process chemicals for ultimate flexibility.
SAFE
Interlocks and electronic safety systems combined with the highest quality construction and material use ensure the operator is protected.
Our Expertise at Your Convenience
We have 28 years of experience with our customers’complex process,multiple chemistries,safety issues,waste containment,and disposal issues.
Benefit from our expertise and let us engineer your conventient solution.
Choose a size that fits your substrate:
Model | Controller | Max Substrate Size | Max RPM | Mounting Options |
EDC-650-23B | 650 Series | ø150mm (5" × 5") | 12,000 rpm | Tabletop,In-Deck, On-Deck |
EDC-650-8B | 650 Series | ø200mm (7" × 7") | 12,000 rpm | Tabletop,In-Deck, On-Deck |
EDC-650-15B | 650 Series | ø300mm (9" × 9") | 12,000 rpm | Tabletop,In-Deck, On-Deck |
(The indicated measurements for square substrates are the length of a side)
